SiGe on Ge
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SiGe on Ge

4 nm layer of Si0.65Ge0.35 grown by MBE on Ge(001) substrate
Device: NTEGRA Aura
Image Courtesy: Dr. Mikhail Shaleev, IPM RAS

r771-010-12_9x12_9_mkm
r771-010-12_9x12_9_mkm
SiGe on Ge

size: 13x13 um
SPM principle: Amplitude modulation AFM
Si buffer on Si substrate
GaAs on GeSi
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