Noise level, XY
(RMS in bandwidth 200 Hz) |
0.2 nm (typically), 0.3 nm (XY 100 um) |
0.1 nm (typically), 0.2 nm (XY 50 um) |
Measuring modes and techniques |
Contact AFM: Topography, Lateral Force, Force Modulation, Spreading Resistance Imaging
Amplitude modulation AFM: Topography, Phase, Feedback
HybriD ModeTM AFM: Topography, Young’s modulus, Work of Adhesion, Viscoelectisity, Current, Piezoresponse Force Microscopy, Fast Force Volume
AFM spectroscopy: Force-distance, Amplitude-distance, Phase-distance, I(V), I(Z)
Magnetic Force Microscopy: Two-pass and Frame Lift DC/AC
Electrostatic Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation
Scanning Capacitance Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation (dC/dZ and dC/dV imaging)
Kelvin Probe Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Phase Modulation
Piezoresponse force microscopy & Switching Spectroscopy
Nanolithography: Voltage, Current, Force |