AlGaN/GaN superlattice cross-section

AFM image of AlGaN/GaN superlattice with 74 Angstroms pitch made in local elasticity (force modulation) mode.

Image courtesy of Alexander Ankudinov and М. Dunaevsky (group of A.Titkov), Ioffe Physico-Technical Institute, St. Petersburg, Russia
size: 500x500 nm
SPM principle: Force Modulation microscopy